How Operating Conditions Influence Wafer Heater Design Choices

https://advanced-heater-source.halcyonledger.com/posts/pi-heater-design-factors-for-better-temperature-uniformity

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result