Designing Heating Zones in a PI Heater for Better Thermal Balance

https://thin-heater-technology.northvaledigest.com/posts/wafer-heater-selection-guide-for-process-equipment-engineers

In sensors, a pi heater must deliver heat in a controlled way. It uses a thin resistive foil circuit laminated in polyimide film. One useful trait is fast response. Still, local hot spots can change the result